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Synthesis of carbon nanotube bridges on patterned silicon wafers by selective lateral growth

โœ Scribed by Y. Han; J. Shin; S. Kim


Book ID
121738752
Publisher
American Institute of Physics
Year
2001
Tongue
English
Weight
780 KB
Volume
90
Category
Article
ISSN
0021-8979

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We have achieved selective growth of high-purity carbon nanotubes (CNTs) on iron-deposited hole-patterns by thermal chemical vapor deposition (CVD) of acetylene gas. The vertically well-aligned CNTs were uniformly synthesized with good selectivity on hole-patterned silicon substrates. The CNTs indic