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Patterned growth of single-walled carbon nanotubes on full 4-inch wafers

โœ Scribed by Franklin, Nathan R.; Li, Yiming; Chen, Robert J.; Javey, Ali; Dai, Hongjie

Book ID
120511446
Publisher
American Institute of Physics
Year
2001
Tongue
English
Weight
588 KB
Volume
79
Category
Article
ISSN
0003-6951

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๐Ÿ“œ SIMILAR VOLUMES

Computer-aided design and growth of sing
Computer-aided design and growth of single-walled carbon nanotubes on 4 in. wafers for electronic device applications
โœ Serin Park; Sohee Park; Hye-Mi So; Eun-Kyoung Jeon; Dong-Won Park; Ju-Jin Kim; B ๐Ÿ“‚ Article ๐Ÿ“… 2010 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 992 KB

We have employed computer-aided furnace design and process simulation to optimize the conditions under which single-walled carbon nanotubes (SWCNTs) may be grown in high yields on 4 in. wafers for electronic device applications. Hydrokinetic simulations were performed to obtain optimized furnace str