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Synthesis of buried layers of β-SiC in Si by multiple energy carbon ion implantations and post thermal annealing

✍ Scribed by P.R. Poudel; P.P. Poudel; B.P. Sharma; J.Y. Hwang; M. El Bouanani; B. Rout; F.D. McDaniel

No coin nor oath required. For personal study only.

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