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Synthesis of aluminum oxide thin films by ion beam and vapor deposition technology

โœ Scribed by K. Ogata; K. Yamaguchi; S. Kiyama; H. Hirano; S. Shimizu; M. Kohata; T. Miyano; Y. Setsuhara; S. Miyake


Book ID
113283621
Publisher
Elsevier Science
Year
1993
Tongue
English
Weight
245 KB
Volume
80-81
Category
Article
ISSN
0168-583X

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