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Synthesis and properties of oligo- and polymethylsilazanes as a precursor for silicon nitride

✍ Scribed by Y. Abe; T. Ozai; Y. Kuno; Y. Nagao; T. Misono

Book ID
104892096
Publisher
Springer
Year
1992
Tongue
English
Weight
310 KB
Volume
2
Category
Article
ISSN
1053-0495

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