Synthesis and properties of Fe3C film by r.f. magnetron sputtering

✍ Scribed by S. Tajima; S. Hirano

• Publisher: Springer
• Year: 1993
• Tongue: English
• Weight: 780 KB
• Volume: 28
• Category: Article
• ISSN: 0022-2461
• DOI: 10.1007/bf00356208

✦ Synopsis

Fe3C film, which is a promising new magnetic recording material, can be synthesized by r.f. magnetron sputtering. Several graphite plates were attached to an iron plate to adjust the area of a composite target for the control of film composition, The crystalline phases in a film changed from Fe-C solid solution to Fe3C with increasing substrate temperature from 350 ~ and above. Sputtering at an argon pressure of 5 Pa was favourable for the formation of crystalline Fe3 C film. All Fe3C films showed in-plane magnetization. The saturation magnetization of the film was around 100-120 e.m.u.g-1 regardless of the deposition conditions. The coercivity of the films increased from 10e to 250 Oe with increasing substrate temperature, and the coercivity remained constant at 250 Oe at 350~ regardless of argon pressure.