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Synthesis and characterization of tin dioxide powders for the realization of thick-film gas sensors

✍ Scribed by M. Honoré; S. Lenaerts; J. Desmet; G. Huyberechts; J. Roggen

Publisher
Elsevier Science
Year
1994
Tongue
English
Weight
332 KB
Volume
19
Category
Article
ISSN
0925-4005

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Tin dioxide films are elaborated by a chemical vapour deposition (CVD) method. An accurate control of deposition parameters (temperature, total pressure, duration) so that appropriate annealing conditions (duration, temperature) can be used to modify the structural properties of the films : grain si