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Synthesis and Characterization of Templating Low Dielectric Constant Organosilicate Films

โœ Scribed by Yu, Suzhu; Wong, Terence K. S.; Hu, Xiao; Pita, Kantisara; Ligatchev, Valeri

Book ID
127084183
Publisher
The Electrochemical Society
Year
2004
Tongue
English
Weight
363 KB
Volume
151
Category
Article
ISSN
0013-4651

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