✦ LIBER ✦
Spin-coated and PECVD low dielectric constant porous organosilicate films studied by 1D and 2D solid-state NMR
✍ Scribed by Gerbaud, Guillaume; Hediger, Sabine; Bardet, Michel; Favennec, Laurent; Zenasni, Aziz; Beynet, Julien; Gourhant, Olivier; Jousseaume, Vincent
- Book ID
- 125547984
- Publisher
- Royal Society of Chemistry
- Year
- 2009
- Tongue
- English
- Weight
- 826 KB
- Volume
- 11
- Category
- Article
- ISSN
- 1463-9076
- DOI
- 10.1039/B909654J
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