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Synthesis and characterization of gallium thiocarboxylates as novel single-source precursors to gallium sulfide thin films by aerosol-assisted CVD

โœ Scribed by Shang, Guihua; Hampden-Smith, Mark J.; Duesler, Eileen N.


Book ID
127232488
Publisher
Royal Society of Chemistry
Year
1996
Tongue
English
Weight
541 KB
Volume
15
Category
Article
ISSN
1359-7345

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ChemInform Abstract: Deposition of Thin
โœ Graeme A. Horley; Mike R. Lazell; Paul O'Brien ๐Ÿ“‚ Article ๐Ÿ“… 2010 ๐Ÿ› John Wiley and Sons โš– 33 KB ๐Ÿ‘ 2 views

Deposition of Thin Films of Gallium Sulfide from a Novel Liquid Single-Source Precursor, Ga(SOCNEt 2 ) 3 , by Aerosol-Assisted CVD. -The novel liquid gallium monothiocarbamato complex (III) is utilized as a single-source precursor for the deposition of face-centered cubic GaS films on glass substra