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Synchrotron lithography for sub-half-micron T-Gates in GAAS-FET

✍ Scribed by K.H. Mueller; Th. Stelter; F. Ponse; H. Weidlich

Publisher: Elsevier Science
Year: 1986
Tongue: English
Weight: 457 KB
Volume: 5
Category: Article
ISSN: 0167-9317
DOI: 10.1016/0167-9317(86)90050-x

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