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Susceptibility of SiO2, ZrO2, and HfO2 dielectrics to moisture contamination

✍ Scribed by Prashant Raghu; Chris Yim; Farhang Shadman; Eric Shero

Publisher: American Institute of Chemical Engineers
Year: 2004
Tongue: English
Weight: 175 KB
Volume: 50
Category: Article
ISSN: 0001-1541
DOI: 10.1002/aic.10148

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