Atomic and electronic structures of amorphous ZrO2 and HfO2 films

✍ Scribed by Vladimir Gritsenko; Daryja Gritsenko; Sergei Shaimeev; Vladimir Aliev; Kamil Nasyrov; Simon Erenburg; Vladimir Tapilin; Hei Wong; M.C. Poon; J.H. Lee; J.-W. Lee; C.W. Kim

• Publisher: Elsevier Science
• Year: 2005
• Tongue: English
• Weight: 219 KB
• Volume: 81
• Category: Article
• ISSN: 0167-9317
• DOI: 10.1016/j.mee.2005.03.056