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Influence of ZrO2 in HfO2 on reflectance of HfO2/SiO2 multilayer at 248 nm prepared by electron-beam evaporation

✍ Scribed by Jingmei Yuan; Lei Yuan; Hongbo He; Kui Yi; Zhengxiu Fan; Jianda Shao

No coin nor oath required. For personal study only.

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Influence of ZrO2 in HfO2 on reflectance of HfO2/SiO2 multilayer at 248&#xa0;nm prepared by electron-beam evaporation