Surface Roughness in Alumina Thin Film Deposited on Silica Using Oblique Incidence

✍ Scribed by He, Li Jun; Li, Chuan; Liu, Xing Zhao

• Book ID: 124168820
• Publisher: Trans Tech Publications, Ltd.
• Year: 2014
• Tongue: English
• Weight: 335 KB
• Volume: 787
• Category: Article
• ISSN: 1662-9752
• DOI: 10.4028/www.scientific.net/MSF.787.373