Surface roughening during low-temperature Si epitaxial growth on singular vs vicinal Si(001) substrates

✍ Scribed by Lee, N.-E.; Cahill, David G.; Greene, J. E.

• Book ID: 118260434
• Publisher: The American Physical Society
• Year: 1996
• Tongue: English
• Weight: 241 KB
• Volume: 53
• Category: Article
• ISSN: 1098-0121
• DOI: 10.1103/physrevb.53.7876