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Surface properties and microstructure of implanted TiN films using MEVVA ion source

✍ Scribed by J.H. Yang; M.F. Cheng; X.D. Luo; T.H. Zhang

Publisher
Elsevier Science
Year
2007
Tongue
English
Weight
374 KB
Volume
445-446
Category
Article
ISSN
0921-5093

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