Surface profilometry by wavelength scanning Fizeau interferometer

✍ Scribed by Akihiro Yamamoto; Ichirou Yamaguchi

• Book ID: 104159498
• Publisher: Elsevier Science
• Year: 2000
• Tongue: English
• Weight: 362 KB
• Volume: 32
• Category: Article
• ISSN: 0030-3992
• DOI: 10.1016/s0030-3992(00)00055-4

✦ Synopsis

We have applied wavelength scanning interferometry to Fizeau interferometer for surface proÿlometry. This interferometer is free from ambiguity of the sign in the measurement result. It is more compact in setup than the Michelson interferometer used previously. Experimental results from a step and a dip on a mirror surface are shown. In the focal depth of imaging system, we could measure a mirror surface with less than standard deviations of 20 m including quantization error in frequency analysis. We also could measure the surface shape of a coin. Origins of the noises appearing in the results are also discussed.