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Speckle decorrelation in surface profilometry by wavelength scanning interferometry

✍ Scribed by Yamaguchi, Ichirou ;Yamamoto, Akihiro ;Kuwamura, Susumu

Book ID: 115347507
Publisher: The Optical Society
Year: 1998
Tongue: English
Weight: 179 KB
Volume: 37
Category: Article
ISSN: 1559-128X
DOI: 10.1364/AO.37.006721

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