Surface Shape Measurement by Wavelength Scanning Interferometry Using an Electronically Tuned Ti:sapphire Laser

✍ Scribed by Akihiro Yamamoto; Chih-Che Kuo; Kei Sunouchi; Satoshi Wada; Ichirou Yamaguchi; Hideo Tashiro

• Book ID: 106255366
• Publisher: Optical Society of Japan
• Year: 2001
• Tongue: English
• Weight: 813 KB
• Volume: 8
• Category: Article
• ISSN: 1340-6000
• DOI: 10.1007/s10043-001-0059-8