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Phase Measurement Algorithm in Wavelength Scanned Fizeau Interferometer

✍ Scribed by Ryohei Hanayama; Kenichi Hibino; Shin’ichi Warisawa; Mamoru Mitsuishi

Book ID
106255590
Publisher
Optical Society of Japan
Year
2004
Tongue
English
Weight
189 KB
Volume
11
Category
Article
ISSN
1340-6000

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We have applied wavelength scanning interferometry to Fizeau interferometer for surface proÿlometry. This interferometer is free from ambiguity of the sign in the measurement result. It is more compact in setup than the Michelson interferometer used previously. Experimental results from a step and a