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Surface Morphology of AlxGa1-xN Films Grown by MOCVD

✍ Scribed by Geng, L. ;Ponce, F.A. ;Tanaka, S. ;Omiya, H. ;Nakagawa, Y.

Publisher
John Wiley and Sons
Year
2001
Tongue
English
Weight
213 KB
Volume
188
Category
Article
ISSN
0031-8965

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Laue oscillations) appear close to the high-angle reflections. The film thickness can then be evaluated as: where W i and W i-1 are positions of adjacent satellite maxima.