Surface Quality of Epitaxial CeO2 Thin Films Grown on Sapphire by Aerosol MOCVD

✍ Scribed by Karol Fröhlich; Jan Šouc; Daniel Machajdík; Matej Jergel; Johan Snauwaert; Louis Hellemans

• Publisher: John Wiley and Sons
• Year: 1998
• Tongue: English
• Weight: 382 KB
• Volume: 04
• Category: Article
• ISSN: 0948-1907
• DOI: 10.1002/(sici)1521-3862(199812)04:06<216::aid-cvde216>3.0.co;2-v

✦ Synopsis

Laue oscillations) appear close to the high-angle reflections. The film thickness can then be evaluated as:

where W i and W i-1 are positions of adjacent satellite maxima.