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Surface modifications of amorphous hydrogenated carbon films submitted to carbon tetrafluorine plasma treatment

✍ Scribed by da Costa, M.E.H. Maia; Freire, F.L.

Book ID: 121925899
Publisher: Elsevier Science
Year: 2012
Tongue: English
Weight: 583 KB
Volume: 22
Category: Article
ISSN: 0925-9635
DOI: 10.1016/j.diamond.2011.10.025

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