Microwave plasma apparatus for depositio
โ
K. Hammer; S. Roth; B. Mainz; O. Stenzel; W. Scharff; W. Dworschak; R. Kleber; A
๐
Article
๐
1991
๐
Elsevier Science
๐
English
โ 242 KB
A novel arrangement for the production of a microwave plasma by electron cyclotron resonance is described. Ion currents with current densities of up to 2.5 mA cm-2 can be homogeneously extracted from the plasma over surfaces having diameters of up to 10 cm. The microwave plasmatron can be operated b