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Annealing effects in amorphous hydrogenated carbon films prepared by plasma deposition from butane gas

✍ Scribed by Yasuda, K. ;Masuda, H. ;Takeda, M. ;Yoshida, A.

Publisher: John Wiley and Sons
Year: 1986
Tongue: English
Weight: 298 KB
Volume: 95
Category: Article
ISSN: 0031-8965
DOI: 10.1002/pssa.2210950131

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