Effects of photo-assisted electrodeless and ion RF-sputter etching on the structural and optical properties of sputtered ZnO:Al thin films were investigated. Photo-assisted electrodeless etching was appropriate for getting "smooth" surfaces and ion RF-sputter etching by high power has significantly
β¦ LIBER β¦
Surface modification of thin polystyrene films
β Scribed by D. F. Siqueira-Petri; G. Wenz; P. Schunk; T. Schimmel; M. Bruns; M. A. Dichtl
- Publisher
- Springer
- Year
- 1999
- Weight
- 416 KB
- Volume
- 277
- Category
- Article
- ISSN
- 0340-255X
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