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Surface modification of a-SiC thin films with ex-situ hydrogenation

✍ Scribed by J.A. Kalomiros; E.C. Paloura; A. Ginoudi; S. Kennou; S. Ladas; Ch. Lioutas; N. Vouroutzis; G. Voutsas; D. Girginoudi; N. Georgoulas; A. Thanailakis

Publisher: Elsevier Science
Year: 1995
Tongue: English
Weight: 410 KB
Volume: 96
Category: Article
ISSN: 0038-1098
DOI: 10.1016/0038-1098(95)00526-9

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