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Surface modification of POSS–polyimide hybrid films by atomic oxygen using ECR plasma

✍ Scribed by Duo, Shuwang; Ke, Huan; Liu, Tingzhi; Song, Mimi; Li, Meishuan

Book ID: 120582840
Publisher: Elsevier Science
Year: 2013
Tongue: English
Weight: 923 KB
Volume: 307
Category: Article
ISSN: 0168-583X
DOI: 10.1016/j.nimb.2012.10.036

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