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Surface micromachined Fabry-Perot tunable filter

✍ Scribed by Tran, A.T.T.D.; Lo, Y.H.; Zhu, Z.H.; Haronian, D.; Mozdy, E.

Book ID: 119785296
Publisher: IEEE
Year: 1996
Tongue: English
Weight: 510 KB
Volume: 8
Category: Article
ISSN: 1041-1135
DOI: 10.1109/68.481128

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