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Surface micromachined diamond microswitch

✍ Scribed by Ertl, S.; Adamschik, M.; Schmid, P.; Gluche, P.; Flöter, A.; Kohn, E.

Book ID
123401053
Publisher
Elsevier Science
Year
2000
Tongue
English
Weight
242 KB
Volume
9
Category
Article
ISSN
0925-9635

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