✦ LIBER ✦
A novel technique for reconditioning polycrystalline diamond tool surfaces applied for silicon micromachining
✍ Scribed by K. Katahira; K. Nakamoto; P. Fonda; H. Ohmori; K. Yamazaki
- Publisher
- International Academy for Production Engineering
- Year
- 2011
- Tongue
- English
- Weight
- 567 KB
- Volume
- 60
- Category
- Article
- ISSN
- 0007-8506
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