Mounting of micromachined diamond tips and cantilevers

✍ Scribed by Niedermann, Ph.; Hänni, W.; Thurre, S.; Gjoni, M.; Perret, A.; Skinner, N.; Indermühle, P.-F.; Staufer, U.; de Rooij, N. F.

• Book ID: 101223146
• Publisher: John Wiley and Sons
• Year: 1999
• Tongue: English
• Weight: 393 KB
• Volume: 27
• Category: Article
• ISSN: 0142-2421
• DOI: 10.1002/(sici)1096-9918(199905/06)27:5/6<296::aid-sia497>3.0.co;2-e

✦ Synopsis

Micromachined chemical vapour-deposited diamond tips are useful nanotools because of their high hardness, electrical conductivity and chemically inert nature. A technology is described to transfer pyramidal diamond tips on cantilevers to Pyrex substrates by anodic bonding in selected areas. This technology has been used to fabricate tips for individual handling and hybrid mounting on silicon cantilevers. Bond strengths have been quantiÐed and the devices have been tested in a conducting atomic force microscopy experiment.