Volumetric relative sensitivity factors (RSFs) are determined for 52Cr, 56Fe and 58Ni in an silicon O 2 '-formed oxide using a 12 keV Ga' primary ion beam, and the inΓuence of matrix oxygen content on these RSF values is evaluated. A multivariate expression for RSF values as a function of oxygen con
Surface investigations of silylated substrates by TOF-SIMS
β Scribed by Dr. Birgit Hagenhoff; Prof. Alfred Benninghoven; Dr. Karl Stoppek-Langner; Dr. Joseph Grobe
- Publisher
- John Wiley and Sons
- Year
- 1994
- Tongue
- English
- Weight
- 335 KB
- Volume
- 6
- Category
- Article
- ISSN
- 0935-9648
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