✦ LIBER ✦

Surface chemistry of 6H-SiC(000) after reactive ion etching

✍ Scribed by Sieber, N.; Hollering, M.; Ley, L.

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Schottky contact investigation on reacti

✍ Constantinidis, G.; Kuzmik, J.; Michelakis, K. 📂 Article 📅 1997 🏛 Elsevier Science 🌐 English ⚖ 351 KB

Studies of SiGe alloy surfaces after rea

✍ Richter, H. H. ;Wolff, A. ;Tillack, B. ;Krüger, D. ;Höppner, K. ;Eggs, C. 📂 Article 📅 1995 🏛 John Wiley and Sons 🌐 English ⚖ 465 KB

Removal of surface contamination after r

✍ R Jackson; AJ Pidduck; MA Green 📂 Article 📅 1994 🏛 Elsevier Science 🌐 English ⚖ 869 KB

Reactive ion etching characterization of

✍ G. Saggio; E. Verona; P. Di Rosa; S. La Monica; R. Salotti; L. Schirone 📂 Article 📅 1995 🏛 Elsevier Science 🌐 English ⚖ 392 KB

Surface morphology of 6H-SiC after therm

✍ Ying Gao; S. I. Soloviev; T. S. Sudarshan 📂 Article 📅 2002 🏛 Springer US 🌐 English ⚖ 163 KB

Reactive ion etching of SiC using C2F6/O

✍ S. -M. Kong; H. -J. Choi; B. -T. Lee; S. -Y. Han; J. L. Lee 📂 Article 📅 2002 🏛 Springer US 🌐 English ⚖ 149 KB