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Surface Chemical Control of Mechanical Energy Losses in Micromachined Silicon Structures

✍ Scribed by Wang, Yu; Henry, Joshua A.; Zehnder, Alan T.; Hines, Melissa A.

Book ID
124167858
Publisher
American Chemical Society
Year
2003
Tongue
English
Weight
241 KB
Volume
107
Category
Article
ISSN
0022-3654

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