Abstract
Plasma‐treated poly‐p‐xylylene films have been characterized by neutron activation oxygen analysis, internal reflection (IRS) and transmission infrared spectroscopy, transmission electron microscopy (TEM), and surface contact angle measurements. The results indicate that an oxygen plasma roughens the surface and that oxygen is incorporated into the surface. Oxygen is not detected in the bulk of the sample. The infrared transmission spectra exhibited no carbonyl band, but the relative band intensities changed, indicating a change in ring substitution by a loss of chlorine in the chlorinated poly‐p‐xylylenes. The IRS spectra of the surface of films treated with oxygen plasma did contain carbonyl bands at 1730 and 1640 cm^−1^. Argon and helium plasmas generally decreased the water contact angle measured on plasma‐treated poly‐p‐xylylene surfaces more than oxygen or nitrogen plasma treatments. Regardless of the plasma utilized, the water contact angles increased with time after the treatment but did not recover to the original level. IRS spectra of the surface of films treated with argon plasma contained carbonyl bands at 1730 and 1695 cm^−1^. The adhesion of a polyurethane thermosetting material to a poly‐p‐xylylene surface is greatly improved if a plasma treatment is used prior to the application of the polyurethane. The degree of improvement in adhesion was dependent on the type of plasma and the treatment time.