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Deposition of poly-p-xylylene films by plasma decomposition of cyclodi-p-xylylene

✍ Scribed by A. M. Krasovsky; E. M. Tolstopyatov; P. N. Grakovich

Publisher: John Wiley and Sons
Year: 1995
Tongue: English
Weight: 156 KB
Volume: 57
Category: Article
ISSN: 0021-8995
DOI: 10.1002/app.1995.070570112

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