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Surface- and microanalytical characterization of ion-implanted Si-C-N layers

✍ Scribed by H. Klewe-Nebenius; M. Bruns; H. Lutz; H. Baumann; F. Link; K. Bethge

Book ID
105897307
Publisher
Springer
Year
1998
Tongue
English
Weight
119 KB
Volume
361
Category
Article
ISSN
1618-2650

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Polyethylene (PE) film was implanted with 1000-keV Ar / ions to a fluence of 5 1 10 14 ions/cm 2 under high vacuum conditions (2.5 1 10 06 torr) and the film surface was investigated by means of microhardness and microwear measurements, and FTIR/ATR, Raman, and XPS techniques. Ion implantation signi