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Surface acoustic wave resonators based on (002)AlN/Pt/diamond/silicon layered structure

✍ Scribed by Zhou, Changjian; Yang, Yi; Jin, Hao; Feng, Bin; Dong, Shurong; Luo, Jikui; Ren, Tian-Ling; Chan, Mansun; Yang, Cary Y.

Book ID: 123053559
Publisher: Elsevier Science
Year: 2013
Tongue: English
Weight: 649 KB
Volume: 548
Category: Article
ISSN: 0040-6090
DOI: 10.1016/j.tsf.2013.09.050

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