AlN on silicon based surface acoustic wave resonators operating at 5 GHz

✍ Scribed by Neculoiu, D.; Müller, A.; Deligeorgis, G.; Dinescu, A.; Stavrinidis, A.; Vasilache, D.; Cismaru, A.M.; Stan, G.E.; Konstantinidis, G.

• Book ID: 111858764
• Publisher: The Institution of Electrical Engineers
• Year: 2009
• Tongue: English
• Weight: 182 KB
• Volume: 45
• Category: Article
• ISSN: 0013-5194
• DOI: 10.1049/el.2009.2520