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Surface acoustic wave propagation in aluminum nitride-unpolished freestanding diamond structures

✍ Scribed by Mortet, V.; Elmazria, O.; Nesladek, M.; Assouar, M. B.; Vanhoyland, G.; DHaen, J.; DOlieslaeger, M.; Alnot, P.

Book ID
118258832
Publisher
American Institute of Physics
Year
2002
Tongue
English
Weight
459 KB
Volume
81
Category
Article
ISSN
0003-6951

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## Abstract This paper describes a general finite element method (FEM) for the AC steady state analysis of two‐dimensional piezoelectric devices. The method is applied to a diamond based surface acoustic wave (SAW) layered structure. We determined the penetration depth of the elastic waves correspo