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Suppressed Si precipitation at an AlSi/Si contact by the presence of thin SiO 2 film on the Si substrate

✍ Scribed by Nogami, T; Takahashi, S; Oami, M; Kaneko, Y; Haida, O

Book ID: 125483920
Publisher: Institute of Physics
Year: 1994
Tongue: English
Weight: 968 KB
Volume: 9
Category: Article
ISSN: 0268-1242
DOI: 10.1088/0268-1242/9/11/018

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