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Superfinishing polish of diamond substrates for epitaxial technology

✍ Scribed by G. V. Sharonov; S. A. Petrov

Publisher
Springer US
Year
2011
Tongue
English
Weight
233 KB
Volume
84
Category
Article
ISSN
1573-871X

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## Abstract A transmission electron microscopy (TEM) study, comparing homoepitaxial diamond layers grown on different substrate surface preparation states and crystallographic orientation is presented. Quality of epilayers grown on {111} cleaved surface and on {001} polished one is evaluated in ter