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Polishing technology of surface for diamond film using the method of laser ablation

✍ Scribed by Gu Changzhi; Jin Zengsun; Wang Yuguang; Zhuang Rongshu; Lü Xianyi; Zhao Shutang; Zou Guangtian

Publisher
Springer
Year
1997
Tongue
English
Weight
273 KB
Volume
42
Category
Article
ISSN
1001-6538

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✍ M. Morcrette; P. Barboux; A. Laurent; J. Perrière 📂 Article 📅 1997 🏛 Elsevier Science 🌐 English ⚖ 921 KB

Thin films of nasicon structure have been grown from NaM,(PO,), (M = Ti and Zr) targets onto silicon substrates by the laser ablation method. By the complementary use of electron microscopy, Rutherford backscattering spectrometry and X-ray diffraction techniques. the surface morphology of the deposi