Structural characterization of CVD diamond films using the ESR method
β Scribed by Yoshiyuki Show; Mitsuo Iwase; Tomio Izumi
- Publisher
- Elsevier Science
- Year
- 1996
- Tongue
- English
- Weight
- 501 KB
- Volume
- 274
- Category
- Article
- ISSN
- 0040-6090
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Diamond like carbon (DLC) films is useful for tribology, optical and biocompatible coating applications. Plasma-activated processes such as radio frequency (RF) plasma CVD and electron cyclotron resonance (ECR) microwave (MW) plasma CVD are usually used to grow DLC films. By using a bowl shaped stee
## Abstract Thin polycrystalline diamond films were synthesized on silicon substrate by Hot Filament Chemical Vapor Deposition (HF CVD) technique from a mixture of hydrogen and different content of methyl alcohol. A comparative study on the Electron Paramagnetic Resonance (EPR), Raman spectroscopy