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Substrate Temperature Dependence of Photovoltaic Properties of β-FeSi 2 /Si Heterojunctions Prepared by Facing-Target DC Sputtering

✍ Scribed by Shaban, Mahmoud; Nakashima, Kazuhiro; Yoshitake, Tsuyoshi

Book ID
121865021
Publisher
Institute of Pure and Applied Physics
Year
2007
Tongue
English
Weight
282 KB
Volume
46
Category
Article
ISSN
0021-4922

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## Abstract Single‐phase β‐ and α‐FeSi~2~ thin films can be grown on Si(100) with and without a thin Fe buffer layer by adopting a facing target radio‐frequency magnetron sputtering method. The role of the buffer layer on the formation of β‐ and α‐FeSi~2~ thin film was discussed. The composition of