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Substrate temperature dependence of microcrystalline silicon growth by PECVD technique

✍ Scribed by Sumita Mukhopadhyay; Amartya Chowdhury; Swati Ray

Book ID: 116669039
Publisher: Elsevier Science
Year: 2006
Tongue: English
Weight: 169 KB
Volume: 352
Category: Article
ISSN: 0022-3093
DOI: 10.1016/j.jnoncrysol.2005.11.095

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