Growth of amorphous, microcrystalline and epitaxial silicon at the same substrate temperature under control of atomic hydrogen

✍ Scribed by H. Shirai; H. Tanabe; T. Uematsu; J. Hanna; I. Shimizu

• Book ID: 115987187
• Publisher: Elsevier Science
• Year: 1989
• Tongue: English
• Weight: 219 KB
• Volume: 114
• Category: Article
• ISSN: 0022-3093
• DOI: 10.1016/0022-3093(89)90728-x