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Power density effects on the growth of microcrystalline silicon–carbon alloys by PECVD

✍ Scribed by U. Coscia; G. Ambrosone; S. Lettieri; P. Maddalena; P. Rava; C. Minarini


Book ID
108388543
Publisher
Elsevier Science
Year
2003
Tongue
English
Weight
162 KB
Volume
427
Category
Article
ISSN
0040-6090

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